Highly sensitive and integrated VOC sensor based on silicon nanophotonics

An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensin...

Full description

Saved in:

Bibliographic Details
Main Authors:	Li, Z. Y., Zhang, G., Yang, Z. C., Hao, Y. L., Jin, Y. F., Liu, Ai Qun
Other Authors:	School of Electrical and Electronic Engineering
Format:	Conference or Workshop Item
Language:	English
Published:	2021
Subjects:	Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Optical Ring Resonators Refractive Index
Online Access:	https://hdl.handle.net/10356/151470
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-151470
record_format	dspace
spelling	sg-ntu-dr.10356-1514702021-06-23T07:54:01Z Highly sensitive and integrated VOC sensor based on silicon nanophotonics Li, Z. Y. Zhang, G. Yang, Z. C. Hao, Y. L. Jin, Y. F. Liu, Ai Qun School of Electrical and Electronic Engineering 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Optical Ring Resonators Refractive Index An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensing unit, which subsequently affect the resonance peak position. The relative high sensitivity (1.7 pm/ 1000 ppm for acetone), high stability (<1 pm drift) and fast response time (∼20 s) make it a perfect candidate for VOC safety monitoring and warning. Accepted version 2021-06-23T07:44:54Z 2021-06-23T07:44:54Z 2017 Conference Paper Li, Z. Y., Zhang, G., Yang, Z. C., Hao, Y. L., Jin, Y. F. & Liu, A. Q. (2017). Highly sensitive and integrated VOC sensor based on silicon nanophotonics. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 1479-1482. https://dx.doi.org/10.1109/TRANSDUCERS.2017.7994338 9781538627310 https://hdl.handle.net/10356/151470 10.1109/TRANSDUCERS.2017.7994338 2-s2.0-85029398125 1479 1482 en © 2017 IEEE. Personal use of this material is permitted. Permission from IEEE must be obtained for all other uses, in any current or future media, including reprinting/republishing this material for advertising or promotional purposes, creating new collective works, for resale or redistribution to servers or lists, or reuse of any copyrighted component of this work in other works. The published version is available at: https://doi.org/10.1109/TRANSDUCERS.2017.7994338 application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
language	English
topic	Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Optical Ring Resonators Refractive Index
spellingShingle	Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Optical Ring Resonators Refractive Index Li, Z. Y. Zhang, G. Yang, Z. C. Hao, Y. L. Jin, Y. F. Liu, Ai Qun Highly sensitive and integrated VOC sensor based on silicon nanophotonics
description	An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensing unit, which subsequently affect the resonance peak position. The relative high sensitivity (1.7 pm/ 1000 ppm for acetone), high stability (<1 pm drift) and fast response time (∼20 s) make it a perfect candidate for VOC safety monitoring and warning.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Li, Z. Y. Zhang, G. Yang, Z. C. Hao, Y. L. Jin, Y. F. Liu, Ai Qun
format	Conference or Workshop Item
author	Li, Z. Y. Zhang, G. Yang, Z. C. Hao, Y. L. Jin, Y. F. Liu, Ai Qun
author_sort	Li, Z. Y.
title	Highly sensitive and integrated VOC sensor based on silicon nanophotonics
title_short	Highly sensitive and integrated VOC sensor based on silicon nanophotonics
title_full	Highly sensitive and integrated VOC sensor based on silicon nanophotonics
title_fullStr	Highly sensitive and integrated VOC sensor based on silicon nanophotonics
title_full_unstemmed	Highly sensitive and integrated VOC sensor based on silicon nanophotonics
title_sort	highly sensitive and integrated voc sensor based on silicon nanophotonics
publishDate	2021
url	https://hdl.handle.net/10356/151470
_version_	1703971157090238464

Highly sensitive and integrated VOC sensor based on silicon nanophotonics

Similar Items