Highly sensitive and integrated VOC sensor based on silicon nanophotonics

Highly sensitive and integrated VOC sensor based on silicon nanophotonics

An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensin...

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Bibliographic Details
Main Authors: Li, Z. Y., Zhang, G., Yang, Z. C., Hao, Y. L., Jin, Y. F., Liu, Ai Qun
Other Authors: School of Electrical and Electronic Engineering
Format: Conference or Workshop Item
Language:English
Published: 2021
Subjects:
Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Optical Ring Resonators
Refractive Index
Online Access:https://hdl.handle.net/10356/151470
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Institution: Nanyang Technological University
Language: English
Description
Summary:An integrated volatile organic compounds (VOC) sensor based on silicon photonic ring resonator system is presented in this paper. A thin absorption layer is coated on the silicon surface required to selectively trap the target gas and response as refractive index change. This acts as the main sensing unit, which subsequently affect the resonance peak position. The relative high sensitivity (1.7 pm/ 1000 ppm for acetone), high stability (<1 pm drift) and fast response time (∼20 s) make it a perfect candidate for VOC safety monitoring and warning.

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