Al₂O₃/HfO₂ nanolaminate dielectric boosting IGZO-based flexible thin-film transistors

• Main Authors: Shi, Qiuwei, Aziz, Izzat, Ciou, Jin-Hao, Wang, Jiangxin, Gao, Dace, Xiong, Jiaqing, Lee, Pooi See
• 其他作者: School of Materials Science and Engineering
• 格式: Article
• 語言: English
• 出版: 2023
• 主題: Engineering::Materials; Nanolaminate Dielectric; Thin-Film Transistors
• 在線閱讀: https://hdl.handle.net/10356/164674
• 機構: Nanyang Technological University

Flexible thin-film transistors (TFTs) have attracted wide interest in the development of flexible and wearable displays or sensors. However, the conventional high processing temperatures hinder the preparation of stable and reliable dielectric materials on flexible substrates. Here, we develop a sta...