Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications

Black-Si (b-Si) providing broadband light antireflection has become a versatile substrate for photodetector, photo-electric catalysis, sensor, and photovoltaic devices. However, the conventional fabrication methods suffer from single morphology, low yield, or frangibility. In this work, we present a...

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Main Authors: Wu, Shaoteng, Chen, Qimiao, Zhang, Lin, Ren, Huixue, Zhou, Hao, Hu, Liangxing, Tan, Chuan Seng
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2023
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Online Access:https://hdl.handle.net/10356/164695
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-1646952023-02-10T01:47:06Z Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications Wu, Shaoteng Chen, Qimiao Zhang, Lin Ren, Huixue Zhou, Hao Hu, Liangxing Tan, Chuan Seng School of Electrical and Electronic Engineering Institute of Microelectronics, A*STAR Engineering::Electrical and electronic engineering Germanium Tin Black Si Black-Si (b-Si) providing broadband light antireflection has become a versatile substrate for photodetector, photo-electric catalysis, sensor, and photovoltaic devices. However, the conventional fabrication methods suffer from single morphology, low yield, or frangibility. In this work, we present a high-yield CMOS-compatible technique to produce 6-inches wafer-scale b-Si with diverse random nanostructures. The b-Si is achieved by O2/SF6 plasma-based reactive ion etching (RIE) of the Si wafer which is coated with a GeSn layer. A stable grid of SnOxFy layer, formed during the initial GeSn etching, acts as a self-assembled hard mask for the formation of subwavelength Si nanostructures. B-Si with diverse surface morphologies, such as the nanopore, nanocone, nanohole, nanohillock, and nanowire was achieved. Furthermore, the responsivity of the b-Si metal–semiconductor–metal (MSM) photodetector at the near-infrared (NIR) wavelength range (1,000-1,200 nm) is 40-200% higher than that of planar-Si MSM photodetector with the same level of dark current, which is beneficial for the applications in photon detector, solar cell, and photocatalysis. This work not only demonstrates a new non-lithography method to fabricate wafer-scale b-Si wafers, but also may provide a novel strategy to fabricate other nanostructured surfaces materials (e.g., Ge, or III-V based compound) with morphology engineering. Ministry of Education (MOE) National Research Foundation (NRF) Submitted/Accepted version This work was supported by the National Research Foundation, Singapore, under its Competitive Research Program (CRP Award NRF-CRP19-2017-01), Ministry of Education AcRF Tier 2 (T2EP50121-0001 (MOE-000180-01)) and Ministry of Education AcRF Tier 1 (2021-T1-002-031 (RG112/21)). 2023-02-10T01:47:06Z 2023-02-10T01:47:06Z 2023 Journal Article Wu, S., Chen, Q., Zhang, L., Ren, H., Zhou, H., Hu, L. & Tan, C. S. (2023). Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications. Nanoscale. https://dx.doi.org/10.1039/D2NR06493F 2040-3364 https://hdl.handle.net/10356/164695 10.1039/D2NR06493F en NRF-CRP19-2017-01 T2EP50121-0001 (MOE-000180-01) 2021-T1-002-031 (RG112/21) Nanoscale © 2023 The Royal Society of Chemistry. All rights reserved. This paper was published in Nanoscale and is made available with permission of The Royal Society of Chemistry. application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Engineering::Electrical and electronic engineering
Germanium
Tin
Black Si
spellingShingle Engineering::Electrical and electronic engineering
Germanium
Tin
Black Si
Wu, Shaoteng
Chen, Qimiao
Zhang, Lin
Ren, Huixue
Zhou, Hao
Hu, Liangxing
Tan, Chuan Seng
Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications
description Black-Si (b-Si) providing broadband light antireflection has become a versatile substrate for photodetector, photo-electric catalysis, sensor, and photovoltaic devices. However, the conventional fabrication methods suffer from single morphology, low yield, or frangibility. In this work, we present a high-yield CMOS-compatible technique to produce 6-inches wafer-scale b-Si with diverse random nanostructures. The b-Si is achieved by O2/SF6 plasma-based reactive ion etching (RIE) of the Si wafer which is coated with a GeSn layer. A stable grid of SnOxFy layer, formed during the initial GeSn etching, acts as a self-assembled hard mask for the formation of subwavelength Si nanostructures. B-Si with diverse surface morphologies, such as the nanopore, nanocone, nanohole, nanohillock, and nanowire was achieved. Furthermore, the responsivity of the b-Si metal–semiconductor–metal (MSM) photodetector at the near-infrared (NIR) wavelength range (1,000-1,200 nm) is 40-200% higher than that of planar-Si MSM photodetector with the same level of dark current, which is beneficial for the applications in photon detector, solar cell, and photocatalysis. This work not only demonstrates a new non-lithography method to fabricate wafer-scale b-Si wafers, but also may provide a novel strategy to fabricate other nanostructured surfaces materials (e.g., Ge, or III-V based compound) with morphology engineering.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Wu, Shaoteng
Chen, Qimiao
Zhang, Lin
Ren, Huixue
Zhou, Hao
Hu, Liangxing
Tan, Chuan Seng
format Article
author Wu, Shaoteng
Chen, Qimiao
Zhang, Lin
Ren, Huixue
Zhou, Hao
Hu, Liangxing
Tan, Chuan Seng
author_sort Wu, Shaoteng
title Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications
title_short Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications
title_full Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications
title_fullStr Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications
title_full_unstemmed Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications
title_sort wafer-scale nanostructured black silicon with morphology engineering via advanced sn-assisted dry etching for sensing and solar cell applications
publishDate 2023
url https://hdl.handle.net/10356/164695
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