Wafer-scale nanostructured black silicon with morphology engineering via advanced Sn-assisted dry etching for sensing and solar cell applications

• Main Authors: Wu, Shaoteng, Chen, Qimiao, Zhang, Lin, Ren, Huixue, Zhou, Hao, Hu, Liangxing, Tan, Chuan Seng
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2023
• Subjects: Engineering::Electrical and electronic engineering; Germanium; Tin; Black Si
• Online Access: https://hdl.handle.net/10356/164695
• Institution: Nanyang Technological University

Black-Si (b-Si) providing broadband light antireflection has become a versatile substrate for photodetector, photo-electric catalysis, sensor, and photovoltaic devices. However, the conventional fabrication methods suffer from single morphology, low yield, or frangibility. In this work, we present a...