Mitigation of corner polysilicon residues through nitride liner etch relocation

NAND flash memory has grown enormously and becomes the most popular non-volatile SSD (Solid State Drives). After 2D NAND reaches its limit, the 3D structure has become the mainstream of NAND. 3D NAND increases capacity in a given footprint without an excessive shrinking of the flash memory chips to...

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Bibliographic Details
Main Author: Zheng, Zhe
Other Authors: Wang Hong
Format: Thesis-Master by Coursework
Language:English
Published: Nanyang Technological University 2023
Subjects:
Online Access:https://hdl.handle.net/10356/166578
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Institution: Nanyang Technological University
Language: English