Micro pump using shape memory alloy thin films
The advance of microsystems has made micropump, as one of the most important components in microsystems, received a lot of attention in research and development. Micropump can be actuated by various mechanisms, such as electrostatic, piezoelectric, electromagnetic and shape memory alloy thin film....
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| 格式: | Final Year Project |
| 語言: | English |
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2009
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| 在線閱讀: | http://hdl.handle.net/10356/16738 |
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