2D super-resolution metrology based on superoscillatory light

• Main Authors: Wang, Yu, Chan, Eng Aik, Rendón-Barraza, Carolina, Shen, Yijie, Plum, Eric, Ou, Jun-Yu
• Other Authors: School of Physical and Mathematical Sciences
• Format: Article
• Language: English
• Published: 2024
• Subjects: Physics; Machine learning; Optical metrology
• Online Access: https://hdl.handle.net/10356/181362
• Institution: Nanyang Technological University

Progress in the semiconductor industry relies on the development of increasingly compact devices consisting of complex geometries made from diverse materials. Precise, label-free, and real-time metrology is needed for the characterization and quality control of such structures in both scientific res...