2D super-resolution metrology based on superoscillatory light
Progress in the semiconductor industry relies on the development of increasingly compact devices consisting of complex geometries made from diverse materials. Precise, label-free, and real-time metrology is needed for the characterization and quality control of such structures in both scientific res...
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| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2024
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/181362 |
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| Institution: | Nanyang Technological University |
| Language: | English |