Optical and optoelectronic properties of Si nanocrystals embedded in dielectric matrix

• Main Author: Ding, Liang
• Other Authors: Chen Tupei
• Format: Theses and Dissertations
• Language: English
• Published: 2009
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• Online Access: https://hdl.handle.net/10356/18197
• Institution: Nanyang Technological University

It is the intent of this work to investigate the optical and optoelectronic properties of Si nanocrystals (nc-Si) embedded in dielectric matrix. Si nanocrystals embedded in dielectric films have been synthesized with the technique of Si ion implantation and plasma enhanced vapor deposition (PECVD)....