Optical and optoelectronic properties of Si nanocrystals embedded in dielectric matrix
It is the intent of this work to investigate the optical and optoelectronic properties of Si nanocrystals (nc-Si) embedded in dielectric matrix. Si nanocrystals embedded in dielectric films have been synthesized with the technique of Si ion implantation and plasma enhanced vapor deposition (PECVD)....
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Main Author: | Ding, Liang |
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Other Authors: | Chen Tupei |
Format: | Theses and Dissertations |
Language: | English |
Published: |
2009
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/18197 |
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Institution: | Nanyang Technological University |
Language: | English |
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