Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD

In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed.

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Bibliographic Details
Main Author:	Yoon, Soon Fatt.
Other Authors:	School of Electrical and Electronic Engineering
Format:	Research Report
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
Online Access:	http://hdl.handle.net/10356/2784
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-2784
record_format	dspace
spelling	sg-ntu-dr.10356-27842023-03-04T03:25:14Z Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD Yoon, Soon Fatt. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed. RG 53/99 2008-09-17T09:14:40Z 2008-09-17T09:14:40Z 2001 2001 Research Report http://hdl.handle.net/10356/2784 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Yoon, Soon Fatt. Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD
description	In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed.
author2	School of Electrical and Electronic Engineering
author_facet	School of Electrical and Electronic Engineering Yoon, Soon Fatt.
format	Research Report
author	Yoon, Soon Fatt.
author_sort	Yoon, Soon Fatt.
title	Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD
title_short	Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD
title_full	Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD
title_fullStr	Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD
title_full_unstemmed	Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD
title_sort	development of diamond-like carbon films for large area microelectronic applications using ecr-cvd
publishDate	2008
url	http://hdl.handle.net/10356/2784
_version_	1759858320235036672

Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD

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