Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD
In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed.
محفوظ في:
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| التنسيق: | Research Report |
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2008
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| الوصول للمادة أونلاين: | http://hdl.handle.net/10356/2784 |
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| المؤسسة: | Nanyang Technological University |
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sg-ntu-dr.10356-2784 |
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sg-ntu-dr.10356-27842023-03-04T03:25:14Z Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD Yoon, Soon Fatt. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed. RG 53/99 2008-09-17T09:14:40Z 2008-09-17T09:14:40Z 2001 2001 Research Report http://hdl.handle.net/10356/2784 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| topic |
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials |
| spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials Yoon, Soon Fatt. Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD |
| description |
In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed. |
| author2 |
School of Electrical and Electronic Engineering |
| author_facet |
School of Electrical and Electronic Engineering Yoon, Soon Fatt. |
| format |
Research Report |
| author |
Yoon, Soon Fatt. |
| author_sort |
Yoon, Soon Fatt. |
| title |
Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD |
| title_short |
Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD |
| title_full |
Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD |
| title_fullStr |
Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD |
| title_full_unstemmed |
Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD |
| title_sort |
development of diamond-like carbon films for large area microelectronic applications using ecr-cvd |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/2784 |
| _version_ |
1759858320235036672 |