Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD

• 主要作者: Yoon, Soon Fatt.
• 其他作者: School of Electrical and Electronic Engineering
• 格式: Research Report
• 出版: 2008
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• 在線閱讀: http://hdl.handle.net/10356/2784
• 機構: Nanyang Technological University

In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed.