Development of diamond-like carbon films for large area microelectronic applications using ECR-CVD

• المؤلف الرئيسي: Yoon, Soon Fatt.
• مؤلفون آخرون: School of Electrical and Electronic Engineering
• التنسيق: Research Report
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/2784

In this project, the ECR-CVD technique has been used to deposit amorphous and diamond-like carbon films from a mixture of hydrogen and methane, and for the characterisation of optical, structural and mechanical properties of the films, the following analytical techniques has been employed.