Formation of silicon nodules and the different methods of removing them

Experiments have been done on the use of different metallization target, different metallization scheme and deposition temperature to characterize on the silicon nodule defect. This report summarizes on the investigation on the silicon precipitation problem.

Saved in:

Bibliographic Details
Main Author:	Chan, Ching Kok.
Other Authors:	Ahn Jaeshin
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits
Online Access:	http://hdl.handle.net/10356/3149
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3149
record_format	dspace
spelling	sg-ntu-dr.10356-31492023-07-04T15:05:51Z Formation of silicon nodules and the different methods of removing them Chan, Ching Kok. Ahn Jaeshin School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits Experiments have been done on the use of different metallization target, different metallization scheme and deposition temperature to characterize on the silicon nodule defect. This report summarizes on the investigation on the silicon precipitation problem. Master of Science (Microelectronics) 2008-09-17T09:23:18Z 2008-09-17T09:23:18Z 2002 2002 Thesis http://hdl.handle.net/10356/3149 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits Chan, Ching Kok. Formation of silicon nodules and the different methods of removing them
description	Experiments have been done on the use of different metallization target, different metallization scheme and deposition temperature to characterize on the silicon nodule defect. This report summarizes on the investigation on the silicon precipitation problem.
author2	Ahn Jaeshin
author_facet	Ahn Jaeshin Chan, Ching Kok.
format	Theses and Dissertations
author	Chan, Ching Kok.
author_sort	Chan, Ching Kok.
title	Formation of silicon nodules and the different methods of removing them
title_short	Formation of silicon nodules and the different methods of removing them
title_full	Formation of silicon nodules and the different methods of removing them
title_fullStr	Formation of silicon nodules and the different methods of removing them
title_full_unstemmed	Formation of silicon nodules and the different methods of removing them
title_sort	formation of silicon nodules and the different methods of removing them
publishDate	2008
url	http://hdl.handle.net/10356/3149
_version_	1772825926798671872

Formation of silicon nodules and the different methods of removing them

Similar Items