Formation of silicon nodules and the different methods of removing them

• Main Author: Chan, Ching Kok.
• Other Authors: Ahn Jaeshin
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Integrated circuits
• Online Access: http://hdl.handle.net/10356/3149
• Institution: Nanyang Technological University

Experiments have been done on the use of different metallization target, different metallization scheme and deposition temperature to characterize on the silicon nodule defect. This report summarizes on the investigation on the silicon precipitation problem.