Resolving and guardbanding backend impact for poly plug incomplete barrier contact for SDRAM

• Main Author: Tan, Albert Chong Kit
• Other Authors: Lau, Wai Shing
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: http://hdl.handle.net/10356/3339
• Institution: Nanyang Technological University

Aggressive downscaling leads to increasing density for DRAM (Dynamic Random Access Memory) chips, resulting in higher probability of failure. In this MSc dissertation a key process issue, poly plug incomplete barrier contact (IBC) related to a DRAM yield loss of 3-4% was explored. Both electrical fa...