Fabrication and characterization of composite diamond like carbon films for some applications

The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system.

Saved in:

Bibliographic Details
Main Author:	Zhang, Ping
Other Authors:	Tay Beng Kang
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:	https://hdl.handle.net/10356/3991
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-3991
record_format	dspace
spelling	sg-ntu-dr.10356-39912023-07-04T16:57:37Z Fabrication and characterization of composite diamond like carbon films for some applications Zhang, Ping Tay Beng Kang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:42:00Z 2008-09-17T09:42:00Z 2005 2005 Thesis Zhang, P. (2005). Fabrication and characterization of composite diamond like carbon films for some applications. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/3991 10.32657/10356/3991 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films Zhang, Ping Fabrication and characterization of composite diamond like carbon films for some applications
description	The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system.
author2	Tay Beng Kang
author_facet	Tay Beng Kang Zhang, Ping
format	Theses and Dissertations
author	Zhang, Ping
author_sort	Zhang, Ping
title	Fabrication and characterization of composite diamond like carbon films for some applications
title_short	Fabrication and characterization of composite diamond like carbon films for some applications
title_full	Fabrication and characterization of composite diamond like carbon films for some applications
title_fullStr	Fabrication and characterization of composite diamond like carbon films for some applications
title_full_unstemmed	Fabrication and characterization of composite diamond like carbon films for some applications
title_sort	fabrication and characterization of composite diamond like carbon films for some applications
publishDate	2008
url	https://hdl.handle.net/10356/3991
_version_	1772828044191334400

Fabrication and characterization of composite diamond like carbon films for some applications

Similar Items