Fabrication and characterization of composite diamond like carbon films for some applications
The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | https://hdl.handle.net/10356/3991 |
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| Institution: | Nanyang Technological University |