Fabrication and characterization of composite diamond like carbon films for some applications

• المؤلف الرئيسي: Zhang, Ping
• مؤلفون آخرون: Tay Beng Kang
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials; DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/3991

The filtered cathodic vacuum arc (FCVA) technique is powerful for thin film deposition. In this project, several sets of metal containing amorphous carbon (a-C:Me) films were successfully deposited, from metal/carbon composite targets, by using an FCVA system.