Ferroelectric films for MEMS type devices using novel hybrid processing technology

• المؤلف الرئيسي: Zhao, Chang Lei
• مؤلفون آخرون: Zhu Weiguang
• التنسيق: Theses and Dissertations
• منشور في: 2008
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Microelectromechanical systems
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/4021

Lead zirconate titanate (PZT) films are promising for MEMS type micro- devices applications because of their extremely high electromechanical coupling coefficients and excellent piezoelectric response. PZT piezoelectric film integrated on silicon substrate has been the subject of considerable attent...