Deposition and electrical characterization of aligned carbon film

• 主要作者: Soon, Cheng Wei.
• 其他作者: Tay Beng Kang
• 格式: Final Year Project
• 語言: English
• 出版: 2010
• 主題: DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
• 在線閱讀: http://hdl.handle.net/10356/40857
• 機構: Nanyang Technological University

Amorphous carbon films have attracted the attention of many researchers to study on their applications in the semiconductor industries. The properties of the amorphous carbon films are largely determined by the sp2 to sp3 ratio. The sp2-rich graphite-like carbon is known to be a good electrical cond...