Thermal conductivity measurements and modeling of thin films

Thermal conductivity measurements and modeling of thin films

In order to study thermal conductivities of ta-C and SiC>2 thin films, the PPR system was developed. The analytical expression applied for data extraction was obtained from the transmission-line theory of heat conduction. The latter was originated from Hui and Tan [S.l] and is now extended to inc...

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Main Author: Chung, George Kit Chen.
Other Authors: Hui, Ping
Format: Theses and Dissertations
Published: 2008
Subjects:
DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Online Access:http://hdl.handle.net/10356/4286
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Institution: Nanyang Technological University
id sg-ntu-dr.10356-4286
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spelling sg-ntu-dr.10356-42862023-07-04T16:31:29Z Thermal conductivity measurements and modeling of thin films Chung, George Kit Chen. Hui, Ping School of Electrical and Electronic Engineering DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films In order to study thermal conductivities of ta-C and SiC>2 thin films, the PPR system was developed. The analytical expression applied for data extraction was obtained from the transmission-line theory of heat conduction. The latter was originated from Hui and Tan [S.l] and is now extended to include thermal resistance, pulse shape factor and various boundary conditions. Various pulse shapes are also studied to understand on their effect in curve fitting a three-layer sample, Au/ta-C/Si. It is found that the fitted thermal conductivity of Au is highly pulse shape dependent, but the pulse shape does not affect the thermal property determination of ta-C. Doctor of Philosophy (EEE) 2008-09-17T09:48:21Z 2008-09-17T09:48:21Z 2000 2000 Thesis http://hdl.handle.net/10356/4286 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
spellingShingle DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
Chung, George Kit Chen.
Thermal conductivity measurements and modeling of thin films
description In order to study thermal conductivities of ta-C and SiC>2 thin films, the PPR system was developed. The analytical expression applied for data extraction was obtained from the transmission-line theory of heat conduction. The latter was originated from Hui and Tan [S.l] and is now extended to include thermal resistance, pulse shape factor and various boundary conditions. Various pulse shapes are also studied to understand on their effect in curve fitting a three-layer sample, Au/ta-C/Si. It is found that the fitted thermal conductivity of Au is highly pulse shape dependent, but the pulse shape does not affect the thermal property determination of ta-C.
author2 Hui, Ping
author_facet Hui, Ping
Chung, George Kit Chen.
format Theses and Dissertations
author Chung, George Kit Chen.
author_sort Chung, George Kit Chen.
title Thermal conductivity measurements and modeling of thin films
title_short Thermal conductivity measurements and modeling of thin films
title_full Thermal conductivity measurements and modeling of thin films
title_fullStr Thermal conductivity measurements and modeling of thin films
title_full_unstemmed Thermal conductivity measurements and modeling of thin films
title_sort thermal conductivity measurements and modeling of thin films
publishDate 2008
url http://hdl.handle.net/10356/4286
_version_ 1772828096578191360

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