Thermal conductivity measurements and modeling of thin films

• Main Author: Chung, George Kit Chen.
• Other Authors: Hui, Ping
• Format: Theses and Dissertations
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/4286
• Institution: Nanyang Technological University

In order to study thermal conductivities of ta-C and SiC>2 thin films, the PPR system was developed. The analytical expression applied for data extraction was obtained from the transmission-line theory of heat conduction. The latter was originated from Hui and Tan [S.l] and is now extended to inc...