FE simulation of thin film mechanical sensitivity for MEMS applications
In this report, the use of corrugated diaphragm for microphone sensing is discussed. The corrugated diaphragm is a type of thin film MEMS device that is actuated by an external pressure. The diaphragm’s height is studied in this project to determine the optimum mechanical sensitivity, natural freque...
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| Format: | Final Year Project |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/42866 |
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| Institution: | Nanyang Technological University |
| Language: | English |