FE simulation of thin film mechanical sensitivity for MEMS applications

• Main Author: Zhang, Xin Gang
• Other Authors: Lin Rongming
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: http://hdl.handle.net/10356/42866
• Institution: Nanyang Technological University

In this report, the use of corrugated diaphragm for microphone sensing is discussed. The corrugated diaphragm is a type of thin film MEMS device that is actuated by an external pressure. The diaphragm’s height is studied in this project to determine the optimum mechanical sensitivity, natural freque...