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Effect of thermal-induced stress on SOI power devices

Silicon-on-insulator (SOI) technology presents one way of fabricating semiconductor devices on an insulating substrate rather than in a semiconductor bulk. It is a promising potential technology for the next generation ULSI because of its many advantages over its bulk silicon substrate counterpart,...

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書目詳細資料
主要作者: Huang, Guangyu
其他作者: Tan Cher Ming
格式: Theses and Dissertations
語言:English
出版: 2011
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在線閱讀:https://hdl.handle.net/10356/42905
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機構: Nanyang Technological University
語言: English