Texture and stress study of barrier layers on various low-K materials in copper technology

The texture and stress properties of barrier layers on three types of low-k materials for copper (Cu) interconnects and electrical performance of the structure had been investigated.

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Bibliographic Details
Main Author:	Jia, Guojun
Other Authors:	Zhang, Dao Hua
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
Online Access:	http://hdl.handle.net/10356/4432
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4432
record_format	dspace
spelling	sg-ntu-dr.10356-44322023-07-04T15:09:31Z Texture and stress study of barrier layers on various low-K materials in copper technology Jia, Guojun Zhang, Dao Hua School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics The texture and stress properties of barrier layers on three types of low-k materials for copper (Cu) interconnects and electrical performance of the structure had been investigated. Master of Science (Microelectronics) 2008-09-17T09:51:22Z 2008-09-17T09:51:22Z 2004 2004 Thesis http://hdl.handle.net/10356/4432 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Jia, Guojun Texture and stress study of barrier layers on various low-K materials in copper technology
description	The texture and stress properties of barrier layers on three types of low-k materials for copper (Cu) interconnects and electrical performance of the structure had been investigated.
author2	Zhang, Dao Hua
author_facet	Zhang, Dao Hua Jia, Guojun
format	Theses and Dissertations
author	Jia, Guojun
author_sort	Jia, Guojun
title	Texture and stress study of barrier layers on various low-K materials in copper technology
title_short	Texture and stress study of barrier layers on various low-K materials in copper technology
title_full	Texture and stress study of barrier layers on various low-K materials in copper technology
title_fullStr	Texture and stress study of barrier layers on various low-K materials in copper technology
title_full_unstemmed	Texture and stress study of barrier layers on various low-K materials in copper technology
title_sort	texture and stress study of barrier layers on various low-k materials in copper technology
publishDate	2008
url	http://hdl.handle.net/10356/4432
_version_	1772825946939719680

Texture and stress study of barrier layers on various low-K materials in copper technology

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