Investigation of effects of residual stress on the stiffness of MEMS devices

• Main Author: Law, Xin Ling.
• Other Authors: Ong Lin Seng
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Mechanical engineering::Mechatronics
• Online Access: http://hdl.handle.net/10356/45471
• Institution: Nanyang Technological University

In this thesis, an analysis was conducted to investigate the effects of residual stress on the stiffness of MEMS devices. Three case scenarios using a simple model are designed in order to make a comparison. By comparing the different scenarios, the displacement and frequency difference caused by th...