Investigation of effects of residual stress on the stiffness of MEMS devices

• 主要作者: Law, Xin Ling.
• 其他作者: Ong Lin Seng
• 格式: Final Year Project
• 語言: English
• 出版: 2011
• 主題: DRNTU::Engineering::Mechanical engineering::Mechatronics
• 在線閱讀: http://hdl.handle.net/10356/45471

In this thesis, an analysis was conducted to investigate the effects of residual stress on the stiffness of MEMS devices. Three case scenarios using a simple model are designed in order to make a comparison. By comparing the different scenarios, the displacement and frequency difference caused by th...