Investigation of effects of residual stress on the stiffness of MEMS devices
In this thesis, an analysis was conducted to investigate the effects of residual stress on the stiffness of MEMS devices. Three case scenarios using a simple model are designed in order to make a comparison. By comparing the different scenarios, the displacement and frequency difference caused by th...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Final Year Project |
| Language: | English |
| Published: |
2011
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/45471 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Language: | English |
| id |
sg-ntu-dr.10356-45471 |
|---|---|
| record_format |
dspace |
| spelling |
sg-ntu-dr.10356-454712023-03-04T18:52:13Z Investigation of effects of residual stress on the stiffness of MEMS devices Law, Xin Ling. Ong Lin Seng School of Mechanical and Aerospace Engineering DRNTU::Engineering::Mechanical engineering::Mechatronics In this thesis, an analysis was conducted to investigate the effects of residual stress on the stiffness of MEMS devices. Three case scenarios using a simple model are designed in order to make a comparison. By comparing the different scenarios, the displacement and frequency difference caused by the stress generated in a simplified model can be monitored. Bachelor of Engineering (Mechanical Engineering) 2011-06-14T02:09:54Z 2011-06-14T02:09:54Z 2011 2011 Final Year Project (FYP) http://hdl.handle.net/10356/45471 en Nanyang Technological University 52 p. application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| language |
English |
| topic |
DRNTU::Engineering::Mechanical engineering::Mechatronics |
| spellingShingle |
DRNTU::Engineering::Mechanical engineering::Mechatronics Law, Xin Ling. Investigation of effects of residual stress on the stiffness of MEMS devices |
| description |
In this thesis, an analysis was conducted to investigate the effects of residual stress on the stiffness of MEMS devices. Three case scenarios using a simple model are designed in order to make a comparison. By comparing the different scenarios, the displacement and frequency difference caused by the stress generated in a simplified model can be monitored. |
| author2 |
Ong Lin Seng |
| author_facet |
Ong Lin Seng Law, Xin Ling. |
| format |
Final Year Project |
| author |
Law, Xin Ling. |
| author_sort |
Law, Xin Ling. |
| title |
Investigation of effects of residual stress on the stiffness of MEMS devices |
| title_short |
Investigation of effects of residual stress on the stiffness of MEMS devices |
| title_full |
Investigation of effects of residual stress on the stiffness of MEMS devices |
| title_fullStr |
Investigation of effects of residual stress on the stiffness of MEMS devices |
| title_full_unstemmed |
Investigation of effects of residual stress on the stiffness of MEMS devices |
| title_sort |
investigation of effects of residual stress on the stiffness of mems devices |
| publishDate |
2011 |
| url |
http://hdl.handle.net/10356/45471 |
| _version_ |
1759857967238217728 |