Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique
A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor.
محفوظ في:
المؤلف الرئيسي: | |
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مؤلفون آخرون: | |
التنسيق: | Theses and Dissertations |
منشور في: |
2008
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الموضوعات: | |
الوصول للمادة أونلاين: | https://hdl.handle.net/10356/4572 |
الوسوم: |
إضافة وسم
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المؤسسة: | Nanyang Technological University |
الملخص: | A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor. |
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