Low temperature growth of ZnO thin films by filtered cathodic vacuum arc technique

A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor.

محفوظ في:
التفاصيل البيبلوغرافية
المؤلف الرئيسي: Lee, Hiong Weng
مؤلفون آخرون: Lau Shu Ping, Daniel
التنسيق: Theses and Dissertations
منشور في: 2008
الموضوعات:
الوصول للمادة أونلاين:https://hdl.handle.net/10356/4572
الوسوم: إضافة وسم
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المؤسسة: Nanyang Technological University
الوصف
الملخص:A detailed study of zinc oxide films prepared by filtered cathodic vacuum arc technique was carried out, with an emphasis on the application of ZnO as transparent conductive oxide, as well as the fabrication of a ZnO-based transparent thin film transistor.