Measurement of stress evolution in pulse-reverse electrochemical deposition using Micro-Raman Spectroscopy

• Main Author: Yang, Qi Hua
• Other Authors: Miao Jianmin
• Format: Final Year Project
• Language: English
• Published: 2011
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films
• Online Access: http://hdl.handle.net/10356/45821
• Institution: Nanyang Technological University

Nowadays, copper deposit is extensively used in microelectronic applications, because the electroplated copper exhibits excellent electrical conductivity along with high hardness. in the resent literature, it is known that copper electroplated with pulse reverse current produces larger hardness than...