Optimization and comparison of argon plasma-induced quantum well intermixing using RIE and ICP

In this project, a novel quantum well intermixing (QWI) technique using inductively-coupled (ICP) and reactive-ion etcher (RIE) Argon plasma exposure has been developed.

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Bibliographic Details
Main Author:	Leong, Daniel Woon Loong.
Other Authors:	Ang, Ricky Lay Kee
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
Online Access:	http://hdl.handle.net/10356/4597
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Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-4597
record_format	dspace
spelling	sg-ntu-dr.10356-45972023-07-04T15:59:28Z Optimization and comparison of argon plasma-induced quantum well intermixing using RIE and ICP Leong, Daniel Woon Loong. Ang, Ricky Lay Kee School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics In this project, a novel quantum well intermixing (QWI) technique using inductively-coupled (ICP) and reactive-ion etcher (RIE) Argon plasma exposure has been developed. Master of Engineering 2008-09-17T09:55:02Z 2008-09-17T09:55:02Z 2003 2003 Thesis http://hdl.handle.net/10356/4597 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics Leong, Daniel Woon Loong. Optimization and comparison of argon plasma-induced quantum well intermixing using RIE and ICP
description	In this project, a novel quantum well intermixing (QWI) technique using inductively-coupled (ICP) and reactive-ion etcher (RIE) Argon plasma exposure has been developed.
author2	Ang, Ricky Lay Kee
author_facet	Ang, Ricky Lay Kee Leong, Daniel Woon Loong.
format	Theses and Dissertations
author	Leong, Daniel Woon Loong.
author_sort	Leong, Daniel Woon Loong.
title	Optimization and comparison of argon plasma-induced quantum well intermixing using RIE and ICP
title_short	Optimization and comparison of argon plasma-induced quantum well intermixing using RIE and ICP
title_full	Optimization and comparison of argon plasma-induced quantum well intermixing using RIE and ICP
title_fullStr	Optimization and comparison of argon plasma-induced quantum well intermixing using RIE and ICP
title_full_unstemmed	Optimization and comparison of argon plasma-induced quantum well intermixing using RIE and ICP
title_sort	optimization and comparison of argon plasma-induced quantum well intermixing using rie and icp
publishDate	2008
url	http://hdl.handle.net/10356/4597
_version_	1772826788512137216

Optimization and comparison of argon plasma-induced quantum well intermixing using RIE and ICP

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