SECS/GEM message discovery for rapid equipment integration

This project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries.

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Bibliographic Details
Main Author:	Liang, Zhiqian
Other Authors:	Anton Aendenroomer
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Semiconductors DRNTU::Engineering::Manufacturing
Online Access:	https://hdl.handle.net/10356/4606
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Institution:	Nanyang Technological University

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spelling	sg-ntu-dr.10356-46062023-07-04T16:46:54Z SECS/GEM message discovery for rapid equipment integration Liang, Zhiqian Anton Aendenroomer School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Semiconductors DRNTU::Engineering::Manufacturing This project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries. MASTER OF ENGINEERING (EEE) 2008-09-17T09:55:12Z 2008-09-17T09:55:12Z 2007 2007 Thesis Liang, Z. (2007). SECS/GEM message discovery for rapid equipment integration. Master’s thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4606 10.32657/10356/4606 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Semiconductors DRNTU::Engineering::Manufacturing
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Semiconductors DRNTU::Engineering::Manufacturing Liang, Zhiqian SECS/GEM message discovery for rapid equipment integration
description	This project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries.
author2	Anton Aendenroomer
author_facet	Anton Aendenroomer Liang, Zhiqian
format	Theses and Dissertations
author	Liang, Zhiqian
author_sort	Liang, Zhiqian
title	SECS/GEM message discovery for rapid equipment integration
title_short	SECS/GEM message discovery for rapid equipment integration
title_full	SECS/GEM message discovery for rapid equipment integration
title_fullStr	SECS/GEM message discovery for rapid equipment integration
title_full_unstemmed	SECS/GEM message discovery for rapid equipment integration
title_sort	secs/gem message discovery for rapid equipment integration
publishDate	2008
url	https://hdl.handle.net/10356/4606
_version_	1772826065440342016

SECS/GEM message discovery for rapid equipment integration

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