SECS/GEM message discovery for rapid equipment integration
This project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries.
محفوظ في:
| المؤلف الرئيسي: | |
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| مؤلفون آخرون: | |
| التنسيق: | Theses and Dissertations |
| منشور في: |
2008
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| الموضوعات: | |
| الوصول للمادة أونلاين: | https://hdl.handle.net/10356/4606 |
| الوسوم: |
إضافة وسم
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| المؤسسة: | Nanyang Technological University |
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sg-ntu-dr.10356-4606 |
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sg-ntu-dr.10356-46062023-07-04T16:46:54Z SECS/GEM message discovery for rapid equipment integration Liang, Zhiqian Anton Aendenroomer School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Semiconductors DRNTU::Engineering::Manufacturing This project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries. MASTER OF ENGINEERING (EEE) 2008-09-17T09:55:12Z 2008-09-17T09:55:12Z 2007 2007 Thesis Liang, Z. (2007). SECS/GEM message discovery for rapid equipment integration. Master’s thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4606 10.32657/10356/4606 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
| collection |
DR-NTU |
| topic |
DRNTU::Engineering::Electrical and electronic engineering::Semiconductors DRNTU::Engineering::Manufacturing |
| spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering::Semiconductors DRNTU::Engineering::Manufacturing Liang, Zhiqian SECS/GEM message discovery for rapid equipment integration |
| description |
This project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries. |
| author2 |
Anton Aendenroomer |
| author_facet |
Anton Aendenroomer Liang, Zhiqian |
| format |
Theses and Dissertations |
| author |
Liang, Zhiqian |
| author_sort |
Liang, Zhiqian |
| title |
SECS/GEM message discovery for rapid equipment integration |
| title_short |
SECS/GEM message discovery for rapid equipment integration |
| title_full |
SECS/GEM message discovery for rapid equipment integration |
| title_fullStr |
SECS/GEM message discovery for rapid equipment integration |
| title_full_unstemmed |
SECS/GEM message discovery for rapid equipment integration |
| title_sort |
secs/gem message discovery for rapid equipment integration |
| publishDate |
2008 |
| url |
https://hdl.handle.net/10356/4606 |
| _version_ |
1772826065440342016 |