SECS/GEM message discovery for rapid equipment integration

This project aims to analyze and suggest a solution to alleviate the problem of slow and tedious equiment integration process in the semiconductor manufacturing industries.

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Bibliographic Details
Main Author:	Liang, Zhiqian
Other Authors:	Anton Aendenroomer
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Semiconductors DRNTU::Engineering::Manufacturing
Online Access:	https://hdl.handle.net/10356/4606
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Institution:	Nanyang Technological University

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SECS/GEM message discovery for rapid equipment integration

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