Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and DRAM applications

164 p.

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Bibliographic Details
Main Author: Zhu, Wei Guang.
Other Authors: School of Electrical and Electronic Engineering
Format: Research Report
Published: 2011
Subjects:
Online Access:http://hdl.handle.net/10356/46615
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Institution: Nanyang Technological University
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spelling sg-ntu-dr.10356-466152023-03-04T03:21:52Z Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and DRAM applications Zhu, Wei Guang. School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Semiconductors 164 p. Ferroelectric thin film materials have had a strong resurgence and development in recent years, primarily because of their attractive properties of their high dielectric constant and reversible, large remnant polarization for non-volatile random access memory (NV-RAM) and dynamic random access memory (DRAM) applications. RP 24/93 2011-12-21T03:07:26Z 2011-12-21T03:07:26Z 1995 1995 Research Report http://hdl.handle.net/10356/46615 Nanyang Technological University application/pdf
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
topic DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
spellingShingle DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
Zhu, Wei Guang.
Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and DRAM applications
description 164 p.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Zhu, Wei Guang.
format Research Report
author Zhu, Wei Guang.
author_sort Zhu, Wei Guang.
title Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and DRAM applications
title_short Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and DRAM applications
title_full Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and DRAM applications
title_fullStr Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and DRAM applications
title_full_unstemmed Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and DRAM applications
title_sort ferroelectric lead zirconate titanate (pzt) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and dram applications
publishDate 2011
url http://hdl.handle.net/10356/46615
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