Ferroelectric Lead Zirconate Titanate (PZT) thin films by metallo-organic decomposition technology for high density semiconductor non-volatile memory and DRAM applications

• Main Author: Zhu, Wei Guang.
• Other Authors: School of Electrical and Electronic Engineering
• Format: Research Report
• Published: 2011
• Subjects: DRNTU::Engineering::Electrical and electronic engineering::Semiconductors
• Online Access: http://hdl.handle.net/10356/46615
• Institution: Nanyang Technological University

164 p.