Salicidation : impact on yield
The mechanism and solution of yield drop related to CoSi2/poly LI were studied in depth. Three experiments were carried out to understand and address the low yield of one product running on 0.18 pm CoSi2 process.
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/4670 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Summary: | The mechanism and solution of yield drop related to CoSi2/poly LI were studied in depth. Three experiments were carried out to understand and address the low yield of one product running on 0.18 pm CoSi2 process. |
|---|