Salicidation : impact on yield
The mechanism and solution of yield drop related to CoSi2/poly LI were studied in depth. Three experiments were carried out to understand and address the low yield of one product running on 0.18 pm CoSi2 process.
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/4670 |
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| Institution: | Nanyang Technological University |