Salicidation : impact on yield
The mechanism and solution of yield drop related to CoSi2/poly LI were studied in depth. Three experiments were carried out to understand and address the low yield of one product running on 0.18 pm CoSi2 process.
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2008
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| Online Access: | http://hdl.handle.net/10356/4670 |
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| Institution: | Nanyang Technological University |
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sg-ntu-dr.10356-46702023-07-04T15:45:09Z Salicidation : impact on yield Lim, Nigel Kheck Han. Lau, Wai Shing School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Microelectronics The mechanism and solution of yield drop related to CoSi2/poly LI were studied in depth. Three experiments were carried out to understand and address the low yield of one product running on 0.18 pm CoSi2 process. Master of Science (Microelectronics) 2008-09-17T09:56:18Z 2008-09-17T09:56:18Z 2004 2004 Thesis http://hdl.handle.net/10356/4670 Nanyang Technological University application/pdf |
| institution |
Nanyang Technological University |
| building |
NTU Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NTU Library |
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DR-NTU |
| topic |
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics |
| spellingShingle |
DRNTU::Engineering::Electrical and electronic engineering::Microelectronics Lim, Nigel Kheck Han. Salicidation : impact on yield |
| description |
The mechanism and solution of yield drop related to CoSi2/poly LI were studied in depth. Three experiments were carried out to understand and address the low yield of one product running on 0.18 pm CoSi2 process. |
| author2 |
Lau, Wai Shing |
| author_facet |
Lau, Wai Shing Lim, Nigel Kheck Han. |
| format |
Theses and Dissertations |
| author |
Lim, Nigel Kheck Han. |
| author_sort |
Lim, Nigel Kheck Han. |
| title |
Salicidation : impact on yield |
| title_short |
Salicidation : impact on yield |
| title_full |
Salicidation : impact on yield |
| title_fullStr |
Salicidation : impact on yield |
| title_full_unstemmed |
Salicidation : impact on yield |
| title_sort |
salicidation : impact on yield |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/4670 |
| _version_ |
1772826186318086144 |