Characterization of silicon nanocrystals embedded in SiO2 matrix

In this thesis, we have synthesized Si nanocrystals (nc-Si) embedded in SiO2 films by implanting Si+ into SiO2 films that are thermally grown on Si substrates.

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Bibliographic Details
Main Author: Liu, Yang
Other Authors: Chen Tupei
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:https://hdl.handle.net/10356/4750
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Institution: Nanyang Technological University