Characterization of silicon nanocrystals embedded in SiO2 matrix
In this thesis, we have synthesized Si nanocrystals (nc-Si) embedded in SiO2 films by implanting Si+ into SiO2 films that are thermally grown on Si substrates.
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Format: | Theses and Dissertations |
Published: |
2008
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Online Access: | https://hdl.handle.net/10356/4750 |
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Institution: | Nanyang Technological University |