Characterization of silicon nanocrystals embedded in SiO2 matrix

In this thesis, we have synthesized Si nanocrystals (nc-Si) embedded in SiO2 films by implanting Si+ into SiO2 films that are thermally grown on Si substrates.

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Bibliographic Details
Main Author:	Liu, Yang
Other Authors:	Chen Tupei
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
Online Access:	https://hdl.handle.net/10356/4750
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Institution:	Nanyang Technological University

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spelling	sg-ntu-dr.10356-47502023-07-04T16:59:30Z Characterization of silicon nanocrystals embedded in SiO2 matrix Liu, Yang Chen Tupei School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics In this thesis, we have synthesized Si nanocrystals (nc-Si) embedded in SiO2 films by implanting Si+ into SiO2 films that are thermally grown on Si substrates. DOCTOR OF PHILOSOPHY (EEE) 2008-09-17T09:57:48Z 2008-09-17T09:57:48Z 2005 2005 Thesis Liu, Y. (2005). Characterization of silicon nanocrystals embedded in SiO2 matrix. Doctoral thesis, Nanyang Technological University, Singapore. https://hdl.handle.net/10356/4750 10.32657/10356/4750 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics Liu, Yang Characterization of silicon nanocrystals embedded in SiO2 matrix
description	In this thesis, we have synthesized Si nanocrystals (nc-Si) embedded in SiO2 films by implanting Si+ into SiO2 films that are thermally grown on Si substrates.
author2	Chen Tupei
author_facet	Chen Tupei Liu, Yang
format	Theses and Dissertations
author	Liu, Yang
author_sort	Liu, Yang
title	Characterization of silicon nanocrystals embedded in SiO2 matrix
title_short	Characterization of silicon nanocrystals embedded in SiO2 matrix
title_full	Characterization of silicon nanocrystals embedded in SiO2 matrix
title_fullStr	Characterization of silicon nanocrystals embedded in SiO2 matrix
title_full_unstemmed	Characterization of silicon nanocrystals embedded in SiO2 matrix
title_sort	characterization of silicon nanocrystals embedded in sio2 matrix
publishDate	2008
url	https://hdl.handle.net/10356/4750
_version_	1772826027501813760

Characterization of silicon nanocrystals embedded in SiO2 matrix

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