Intelligent supervisory control for microelectronics fabrication

• المؤلف الرئيسي: Ling, Sze Ling.
• مؤلفون آخرون: Ling Keck Voon
• التنسيق: Final Year Project
• اللغة: English
• منشور في: 2012
• الموضوعات: DRNTU::Engineering::Electrical and electronic engineering::Control and instrumentation::Control engineering
• الوصول للمادة أونلاين: http://hdl.handle.net/10356/50165

In this project, we will focus on the diffusion process, which is one of the processes under microelectronics fabrication process. In the past, the control process is controlled by an engineer, based solely on his experiences and collected data. Hence, the accuracy of the output thickness of the waf...