Nanoscale characterization of metal/dielectric/semiconductor interfaces using ballistic electron emission microscopy
Ballistic electron emission microscopy (BEEM) was employed to study metal/dielectric/semiconductor devices with high spatial resolution. A comprehensive study of the subthreshold characteristics of the BEEM spectra shows that the BEEM current in the subthreshold region decreases at a rate of ~60 mV/...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2012
|
| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/50608 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |
| Language: | English |
Be the first to leave a comment!