Design of novel integrated MIM capacitors for high self resonant frequency and capacity density

Radio frequency (RF) and mixed signal integrated circuits use capacitor elements for decoupling, filtering and oscillating etc. Traditionally, capacitors are fabricated by building parallel plate metal structures using two or more layers of metal in the integrated circuits to form what is known popu...

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Main Author:	Gwee, Su Feng.
Other Authors:	Wang Hong
Format:	Theses and Dissertations
Language:	English
Published:	2012
Subjects:	DRNTU::Engineering::Electrical and electronic engineering
Online Access:	http://hdl.handle.net/10356/50959
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Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-50959
record_format	dspace
spelling	sg-ntu-dr.10356-509592023-07-04T15:37:04Z Design of novel integrated MIM capacitors for high self resonant frequency and capacity density Gwee, Su Feng. Wang Hong School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering Radio frequency (RF) and mixed signal integrated circuits use capacitor elements for decoupling, filtering and oscillating etc. Traditionally, capacitors are fabricated by building parallel plate metal structures using two or more layers of metal in the integrated circuits to form what is known popularly as metal-insulator-metal (MIM) capacitors. Master of Science 2012-12-26T06:55:05Z 2012-12-26T06:55:05Z 2011 2011 Thesis http://hdl.handle.net/10356/50959 en 56 p. application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
language	English
topic	DRNTU::Engineering::Electrical and electronic engineering
spellingShingle	DRNTU::Engineering::Electrical and electronic engineering Gwee, Su Feng. Design of novel integrated MIM capacitors for high self resonant frequency and capacity density
description	Radio frequency (RF) and mixed signal integrated circuits use capacitor elements for decoupling, filtering and oscillating etc. Traditionally, capacitors are fabricated by building parallel plate metal structures using two or more layers of metal in the integrated circuits to form what is known popularly as metal-insulator-metal (MIM) capacitors.
author2	Wang Hong
author_facet	Wang Hong Gwee, Su Feng.
format	Theses and Dissertations
author	Gwee, Su Feng.
author_sort	Gwee, Su Feng.
title	Design of novel integrated MIM capacitors for high self resonant frequency and capacity density
title_short	Design of novel integrated MIM capacitors for high self resonant frequency and capacity density
title_full	Design of novel integrated MIM capacitors for high self resonant frequency and capacity density
title_fullStr	Design of novel integrated MIM capacitors for high self resonant frequency and capacity density
title_full_unstemmed	Design of novel integrated MIM capacitors for high self resonant frequency and capacity density
title_sort	design of novel integrated mim capacitors for high self resonant frequency and capacity density
publishDate	2012
url	http://hdl.handle.net/10356/50959
_version_	1772826963489062912

Design of novel integrated MIM capacitors for high self resonant frequency and capacity density

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