Design of novel integrated MIM capacitors for high self resonant frequency and capacity density

• Main Author: Gwee, Su Feng.
• Other Authors: Wang Hong
• Format: Theses and Dissertations
• Language: English
• Published: 2012
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: http://hdl.handle.net/10356/50959
• Institution: Nanyang Technological University

Radio frequency (RF) and mixed signal integrated circuits use capacitor elements for decoupling, filtering and oscillating etc. Traditionally, capacitors are fabricated by building parallel plate metal structures using two or more layers of metal in the integrated circuits to form what is known popu...