Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction

Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction

Technical Digest - International Electron Devices Meeting

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Bibliographic Details
Main Authors: Zhu, C., Hu, H., Yu, X., Kim, S.J., Chin, A., Li, M.F., Cho, B.J., Kwong, D.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84358
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/84358

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