Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction

Technical Digest - International Electron Devices Meeting

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Main Authors: Zhu, C., Hu, H., Yu, X., Kim, S.J., Chin, A., Li, M.F., Cho, B.J., Kwong, D.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84358
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spelling sg-nus-scholar.10635-843582015-01-16T02:44:55Z Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction Zhu, C. Hu, H. Yu, X. Kim, S.J. Chin, A. Li, M.F. Cho, B.J. Kwong, D.L. ELECTRICAL & COMPUTER ENGINEERING Technical Digest - International Electron Devices Meeting 879-882 TDIMD 2014-10-07T04:51:46Z 2014-10-07T04:51:46Z 2003 Conference Paper Zhu, C.,Hu, H.,Yu, X.,Kim, S.J.,Chin, A.,Li, M.F.,Cho, B.J.,Kwong, D.L. (2003). Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction. Technical Digest - International Electron Devices Meeting : 879-882. ScholarBank@NUS Repository. 01631918 http://scholarbank.nus.edu.sg/handle/10635/84358 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Technical Digest - International Electron Devices Meeting
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zhu, C.
Hu, H.
Yu, X.
Kim, S.J.
Chin, A.
Li, M.F.
Cho, B.J.
Kwong, D.L.
format Conference or Workshop Item
author Zhu, C.
Hu, H.
Yu, X.
Kim, S.J.
Chin, A.
Li, M.F.
Cho, B.J.
Kwong, D.L.
spellingShingle Zhu, C.
Hu, H.
Yu, X.
Kim, S.J.
Chin, A.
Li, M.F.
Cho, B.J.
Kwong, D.L.
Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction
author_sort Zhu, C.
title Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction
title_short Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction
title_full Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction
title_fullStr Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction
title_full_unstemmed Voltage and Temperature Dependence of Capacitance of High-K HfO 2 MIM Capacitors: A Unified Understanding and Prediction
title_sort voltage and temperature dependence of capacitance of high-k hfo 2 mim capacitors: a unified understanding and prediction
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/84358
_version_ 1681089603872751616