Improvement of voltage linearity in high-κ MIM capacitors using HfO2-SiO2 stacked dielectric

10.1109/LED.2004.832785

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Bibliographic Details
Main Authors: Kim, S.J., Cho, B.J., Li, M.-F., Ding, S.-J., Zhu, C., Yu, M.B., Narayanan, B., Chin, A., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82510
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Institution: National University of Singapore